USE OF HIGH-PURITY POLYCRYSTALLINE SILICON ROD AS FEED ROD IN MONOCRYSTALLINE SILICON ZONE MELTING PROCESS AND ITS MANUFACTURING METHOD

摘要

The present invention discloses a use of high-purity polycrystalline silicon rod as feed rod in monocrystalline silicon zone melting process and its manufacturing method. The high-purity silicon rod is pressed into silicon rod with a diameter of 20mm-30mm by isostatic pressing method using silicon powder with purity of 99.9999%-99.9999999999%. Silicon powder used for the feedstock silicon rod has a diameter of 0.1mm-100mm.The density of the feedstock rod is 1.60-2.29g/cm3, anti-pressure parameter thereof is 0.1-50MPa and the purity thereof is 99.9999%-99.9999999999%. The feedstock rod has uniform density, which manifests in that an amplitude of density difference is 0-18% between any two points on any cross section of the silicon bulk. The high-purity polycrystalline silicon rod is of excellent anti-pressure performance and can be directly used as monocrystallinel silicon feedstock rod in zone melting process.