摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor having such improved output accuracy as not to incorrectly output signals as if angular velocity had occurred when positional displacement of detection electrodes provided for a first oscillator and a second oscillator has occurred and that no angular velocity has occurred. <P>SOLUTION: The angular velocity sensor is provided with an electrode 28 for detecting the amount of displacement of a first electrode and an electrode 29 for detecting the amount of displacement of a second electrode at locations in the second oscillator 23 corresponding to locations provided with a first driving electrode 25 and a second driving electrode 26 in the first oscillator 22. <P>COPYRIGHT: (C)2010,JPO&INPIT |