| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a synthetic silica glass member by which a synthetic silica glass member cut from a synthetic silica glass body is subjected to heating treatment, thus synthetic silica glass member from which the fine structural unevenness is removed, is produced while suppressing the deformation of the synthetic silica glass member. <P>SOLUTION: The method for producing a synthetic silica glass member comprises: a step where a synthetic silica-titania glass body is formed by a VAD (Vapor phase Axial Deposition) method or a direct method; a step where the synthetic silica-titania glass body is cut to form a planar synthetic silica-titania glass member; a step where, while preheating the whole of the synthetic silica-titania glass member to 600 to 900°C, one side face is heated at least to 1,400°C; and a step where, after the heating step, the synthetic silica-titania glass member is held at a strain point or above and is subjected to annealing treatment. <P>COPYRIGHT: (C)2010,JPO&INPIT |
