发明名称 LIGHT-IRRADIATING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a light-irradiating device housing a lamp containing mercury in the enclosed substance, the device for preventing scattering of mercury enclosed in the lamp when the lamp is broken and recovering the mercury. <P>SOLUTION: The light from a lamp 1 containing mercury is condensed by a condenser mirror 2 to exit from the light-irradiating device 10 through an integrator 5, a collimator mirror 6 or the like. The light-irradiating device 10 includes an inlet 7a of cooling air to supply cooling air and a discharge port 7b, and with a cyclone collector 13 between the discharge port 7b and a discharge blower (discharge fan) 8. When the lamp is turned on, the discharge blower 8 is operated, and cooling air taken through the cooling air inlet 7a cools the condenser mirror 2 or the lamp 1 and is discharged through the discharge port 7b. When the lamp is broken during lighting, the mercury in a state of liquid particles, small glass flakes of the lamp or the like are introduced together with the cooling air that cools the lamp 1 into the cyclone collector 13, where the flakes of the lamp and mercury particles are separated from the cooling air and collected. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010085950(A) 申请公布日期 2010.04.15
申请号 JP20080258065 申请日期 2008.10.03
申请人 USHIO INC 发明人 NAKADA SHIGENORI;MOMOCHI NOBUMOTO
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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