PATTERN INSPECTING METHOD, ION IMPLANTATION CONTROL METHOD, AND ION IMPLANTATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an inspecting method capable of appropriately inspecting an ion implantation pattern. SOLUTION: The pattern inspecting method includes: a film forming process of forming a film on a substrate; an ion implantation pattern forming process S12 of forming an ion implantation pattern on the film through an opening pattern formed on a stencil mask; and an optical inspecting process S13 of optically inspecting the ion implantation pattern based upon the opening pattern. COPYRIGHT: (C)2010,JPO&INPIT