RF RETURN PATH FOR LARGE PLASMA PROCESSING CHAMBER,申请号US20090576991-传众专利搜索

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发明名称	RF RETURN PATH FOR LARGE PLASMA PROCESSING CHAMBER
摘要
申请公布号	US2010089319(A1)	申请公布日期	2010.04.15
申请号	US20090576991	申请日期	2009.10.09
申请人	APPLIED MATERIALS, INC.	发明人	SORENSEN CARL A.;WHITE JOHN M.;KUDELA JOZEF;BAEK JONGHOON;CHEN JRIYAN JERRY;MCPHERSON STEVE;CHOI SOO YOUNG;TINER ROBIN L.
分类号	C23C16/00	主分类号	C23C16/00
代理机构		代理人
主权项
地址

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