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发明名称
MULTI-FACETED MIRROR
摘要
申请公布号
EP1472562(B1)
申请公布日期
2010.04.14
申请号
EP20020806742
申请日期
2002.12.23
申请人
CARL ZEISS SMT AG
发明人
HOLDERER, HUBERT;WEISS, MARKUS;SINGER, WOLFGANG;SEIFERT, ANDREAS;HEISLER, ANDREAS;MELZER, FRANK;MANN, HEINZ;FALTUS, JUERGEN
分类号
G02B26/08;G02B7/182;G02B5/09;G02B7/198;G03F7/20;H01L21/027
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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