发明名称 Photosensitive composition, pattern forming method using the photosensitive composition and compound for use in the photosensitive composition
摘要 A photosensitive composition comprising a compound capable of generating a compound having a specific structure upon irradiation with actinic rays or radiation; a pattern forming method using the photosensitive composition; a compound having a specific structure; and a compound capable of generating a compound having a specific structure upon irradiation with actinic rays or radiation.
申请公布号 US7695891(B2) 申请公布日期 2010.04.13
申请号 US20060471713 申请日期 2006.06.21
申请人 FUJIFILM CORPORATION 发明人 WADA KENJI
分类号 G03F7/004;C07C309/00 主分类号 G03F7/004
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