发明名称 |
Titanium oxide photocatalyst thin film and production method of titanium oxide photocatalyst thin film |
摘要 |
The present invention provides a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and a production method for producing a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and comprising a step of radiating excimer beam to the titanium oxide thin film while heating substrate on which the titanium oxide thin film is disposed in vacuum or gas atmosphere in the presence of a silicon-including compound.
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申请公布号 |
US7695774(B2) |
申请公布日期 |
2010.04.13 |
申请号 |
US20050125260 |
申请日期 |
2005.05.10 |
申请人 |
FUJI XEROX CO., LTD.;TOUDAI TLO, LTD. |
发明人 |
OHTSU SHIGEMI;MARUYAMA TATSUYA;AKUTSU EIICHI;HASHIMOTO KAZUHITO |
分类号 |
B01D53/86;B05D3/06;A01N59/16;B01J21/08;B01J35/02;B01J37/02;B01J37/34;B05D3/02;B05D5/06;C03C17/23;C03C17/34;C23C14/08;C23C14/28;C23C14/58;C23C16/48;C23C16/56 |
主分类号 |
B01D53/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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