发明名称 Methods for patterning films, fabricating organic electroluminescence display and fabricating thin film transistor array substrate
摘要 A method for fabricating a thin film transistor array substrate is provided. Wherein, a plurality of contact holes and recesses are formed in a protection layer disposed upon thin film transistors. Each recess comprises an under-cut profile while each contact hole exposes a drain-metal layer of a corresponding thin film transistor. Then, a transparent conductor layer is formed on the protection layer, which in turn fills in the contact holes so as to be electrically connected to the drain-metal layer. Besides, the transparent conductor layer automatically segregates at the recesses to form a plurality of pixel electrodes, whereby the plurality of pixel electrodes can be formed without the utilization of photolithography and etching processes and thus fabricating cost is lowered.
申请公布号 US7696079(B2) 申请公布日期 2010.04.13
申请号 US20050162867 申请日期 2005.09.27
申请人 CHUNGHWA PICTURE TUBES, LTD. 发明人 CHANG HSI-MING
分类号 H01L21/44 主分类号 H01L21/44
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