MULTI-TYPE OXYGEN SENSOR FOR MEASURING CELLULAR RESPIRATION LEVEL INTEGRATED WITH CELL COUNTER AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: A multi-type oxygen sensor integrated with a cell counter is provided to measure various properties while processing more than two reagents for one cell solution, and to measure multiple samples while the cell activity is high. CONSTITUTION: A multi-type oxygen sensor is laminated with an oxygen sensor(1`) and a cell counter(101`). The oxygen sensor comprises: a first substrate(10); a membrane substrate bonded to the first substrate and defining multiple chambers between the first substrate and the membrane substrate, while including each membrane to selectively transmit oxygen into the chamber; and an electrode formed in each chamber. The cell counter comprises: a second substrate formed with a hole matching each membrane; a cell inlet to insert a cell solution; a channel substrate(120) defining a channel to insert the cell solution on each membrane; and an electrode formed on the channel connected to the membranes.