| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device including a plurality of movable stages, wherein a disadvantage caused by connecting a line to the stage is reduced. <P>SOLUTION: This stage device is equipped with: a plurality of stages 20 and 30 movable across a plurality of areas; movable bodies 22 and 32 provided respectively to the plurality of stages so as to move across the plurality of areas; a plurality of lines 21 and 31 for connecting the plurality of stages to the plurality of movable bodies so as to connect the stage and the movable body which correspond to each other; a drive part for driving the plurality of movable bodies; and a control part 40 for controlling a drive by the drive part. <P>COPYRIGHT: (C)2010,JPO&INPIT |
