| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce the time required for correcting a defect on a sample. <P>SOLUTION: According to one embodiment, an inspection and correction device 100 inspects a defect on a mask 20 and corrects the defect. The device includes: a lighting optical system for applying illuminating light from an ultraviolet laser light source 1 to the mask 20; and an enlarged projection optical system for observing the mask 20. The lighting optical system includes: a rod type integrator 3 for making the distribution of intensity of illuminating light uniform; and a condensing optical system 11 for condensing illuminating light. The rod type integrator 3 and the condensing optical system 11 are taken in and out on the optical axis. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
