| 摘要 |
<p>[PROBLEMS]To realize a system in which a resist stripper liquid used in resist stripping is regulated so as to have a resist component concentration within a certain concentration range even when the resist stripper liquid is continuously used for long without replacing it.[MEANS FOR SOLVING PROBLEMS]In stripping a positive resist with a stripper liquid, the resist components which have dissolved in the stripper liquid can be diminished by cross-flow filtration with a specific ceramic filter (5). In the resist stripping system, a resist-component-containing stripper liquid resulting from a stripping step is treated in a filtration step, and the resultant concentrated stripper liquid having a heightened resist-component concentration is suitably discharged from the system. A fresh stripper liquid is suitably added to the stripper liquid from which the resist components have been removed, and the resultant stripper liquid is reused in the stripping step.</p> |
