发明名称 OPTICAL MICROCANTILEVER, METHOD OF MANUFACTURING THE SAME, AND OPTICAL MICROCANTILEVER HOLDER
摘要 PROBLEM TO BE SOLVED: To provide an optical microcantilever capable of reducing loss of a propagating light. SOLUTION: The optical microcantilever 10 includes: a support 1, an optical waveguide 2, a light shielding film 3, a reflecting film 4, a pointed tip 5, a microscopic aperture 6 formed at the end of the tip 5, and a mirror 7 for reflecting the propagating light H propagated from a light input/output end 8 of the optical waveguide 2 towards the microscopic aperture 6. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010078618(A) 申请公布日期 2010.04.08
申请号 JP20100002953 申请日期 2010.01.08
申请人 SEIKO INSTRUMENTS INC 发明人 NIWA TAKASHI;KATO KENJI;MITSUOKA YASUYUKI;OMI MANABU;KASAMA NOBUYUKI;ICHIHARA SUSUMU;CHIBA TOKUO
分类号 G01Q60/22 主分类号 G01Q60/22
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