SUBSTRATE DETECTION DEVICE AND METHOD

摘要

Provided is a substrate detection device including: a collimate reflection plate arranged in the vicinity of a plurality of substrates; an illumination means which emits light in a planar shape toward the collimate reflection plate and is arranged at such a position that the end portions of the substrates are located in the optical path of the illumination means; an imaging means for imaging an illumination transparent image containing the end portions of the substrates formed on the collimate reflection plate by the light emitted in the planar shape from the illumination means; and an image processing means which processes the image of the illumination transparent image acquired by the imaging means and detects the containing state of the substrates.