| 摘要 |
<P>PROBLEM TO BE SOLVED: To form an accurate pattern without reducing a data processing speed even in the case of a high-density drawing pattern having a large data amount. <P>SOLUTION: A fixed form pattern CP repeatedly appearing in a drawing pattern PW is extracted from the drawing pattern PW, and a series of fixed form raster data for exposure is stored in a memory in association with paste numbers. During exposure operation, vector data of a peculiar pattern PB is converted to raster data in accordance with a relative position of an exposure area, and fixed form raster data for exposure corresponding to the relative position of the exposure area is read out from the memory. The read fixed form raster data for exposure and the peculiar raster data are combined to generate comprehensive exposure raster data. <P>COPYRIGHT: (C)2010,JPO&INPIT |
