ELECTROMAGNETIC BAND GAP STRUCTURE, ELEMENT COMPRISING SAME, SUBSTRATE, MODULE, SEMICONDUCTOR DEVICE AND PRODUCTION METHODS THEREOF

摘要

A small-sized and thin electromagnetic band gap structure which can be surface-mounted or built in a substrate.  An embodiment of the electromagnetic band gap structure comprises an insulating substrate, a plurality of conductor pieces regularly arranged on the insulating substrate, a dielectric layer so formed as to fill up the space between adjacent conductor pieces, an interlayer insulating layer formed on the dielectric layer, and a conductor plane formed on the interlayer insulating layer and connected with each conductor piece by a conductor penetrating through the interlayer insulating layer.