| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprinting device and an imprinting method capable of performing a process for performing imprinting by filling resin and a process for applying resin in parallel to achieve high throughput. SOLUTION: The imprinting device and the imprinting method include: a first drive mechanism for changing the relative positions of a substrate and a mold to a face direction in parallel with the substrate surface; and a second drive mechanism for changing the relative positions of the substrate and a coating mechanism to a face direction in parallel with the substrate surface. COPYRIGHT: (C)2010,JPO&INPIT |
