| 发明名称 |
METHOD AND SYSTEM FOR MANAGING PROCESS JOBS IN A SEMICONDUCTOR FABRICATION FACILITY |
| 摘要 |
A method and system for managing process jobs in a semiconductor fabrication facility is described. In one embodiment, the method includes receiving a plurality of process jobs associated with one or more priorities. The method further includes executing the plurality of process jobs in an order reflecting the priorities. The order is modifiable in real time upon receiving a new process job with a priority higher than the priorities of the plurality of process jobs.
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| 申请公布号 |
US2010087941(A1) |
申请公布日期 |
2010.04.08 |
| 申请号 |
US20080244735 |
申请日期 |
2008.10.02 |
| 申请人 |
ASSAF SHAY;BABU VENKATESH;FLORES ROBERT D;HICKEY BRENDAN;KUTTANNAIR KRISHNA;PARK SONG J;RHEE ADRIAN;WANG CHONGYANG CHRIS |
发明人 |
ASSAF SHAY;BABU VENKATESH;FLORES ROBERT D.;HICKEY BRENDAN;KUTTANNAIR KRISHNA;PARK SONG J.;RHEE ADRIAN;WANG CHONGYANG CHRIS |
| 分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
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