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经营范围
发明名称
Thin Film Forming Apparatus
摘要
申请公布号
KR100951389(B1)
申请公布日期
2010.04.08
申请号
KR20080003418
申请日期
2008.01.11
申请人
发明人
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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