发明名称 |
NON-CONVENTIONAL METHOD OF SILICON WAFER SAWING USING A PLURALITY OF WAFER SAW ROTATIONAL ANGLES |
摘要 |
<p>A silicon wafer saw can be set to either three or four different cutting angle orientations from a zero degree reference to produce integrated circuit dice having corners greater than 90 degrees. Three different saw angle orientations will produce six sided dice, and four different saw cutting angle orientations will produce eight sided dice.</p> |
申请公布号 |
WO2014126872(A1) |
申请公布日期 |
2014.08.21 |
申请号 |
WO2014US15661 |
申请日期 |
2014.02.11 |
申请人 |
MICROCHIP TECHNOLOGY INCORPORATED |
发明人 |
BUNKER, MATHEW;KENGANANTANON, EKGACHAI;SAWATJEEN, SURAPOL |
分类号 |
H01L21/78 |
主分类号 |
H01L21/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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