IMAGE PROCESSING SYSTEM, AND SCANNING ELECTRON MICROSCOPE INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a means for pattern matching which obtains position selection accuracy sufficient for measurement and achieves high-speed processing even when size and shape change and similar patterns coexist in pattern matching for specifying a measuring position. SOLUTION: This image processing system includes a means for using a plurality of parts of a template as small templates for template matching of a pattern image, a means for extracting a similar pattern using position information of the template matching and calculating a magnification/reduction rate and a distortion rate, and a means for setting a condition for classification on the basis of the magnification/reduction rate and the distortion rate. COPYRIGHT: (C)2010,JPO&INPIT