HIGH SENSITIVE INFRARED DETECTOR FOR NDIR TYPE GAS SENSOR USING WAFER LEVEL PACKAGING AND ITS MANUFACTURING METHOD

摘要

PURPOSE: A high sensitive infrared detector for an NDIR-type gas sensor using a wafer level packaging and a method for manufacturing the same are provided to reduce manufacturing cost and time using the junction of a wafer. CONSTITUTION: An upper substrate(121) includes a first cavity and an infrared filter and is bonded on the upper side of a lower substrate. A getter is formed in the upper substrate. A metal solder layer bonds the upper substrate and the lower substrate. At least one second cavity is formed on the upper side of the lower substrate. A sensor(113) and a support unit(115) are formed on the second cavity. The sensor senses infrared rays. The support unit supports the both side of the sensor.