DIAPHRAGM STRUCTURE AND ACOUSTIC SENSOR

摘要

A through-hole 102 is formed so as to penetrate from an upper surface to a bottom surface of a substrate 101. A vibrating electrode film 103 is formed on the substrate 101 so as to cover the through-hole 102. A portion of the vibrating electrode film 103, which is positioned on the through-hole 102, functions as a diaphragm 104. An opening shape of the through-hole 102 in the upper surface of the substrate 101 is hexagonal.