发明名称 SEMICONDUCTOR DEVICE AND DUMMY PATTERN ARRANGEMENT METHOD
摘要 A semiconductor device includes a plurality of wiring patterns arranged in a first wiring layer of the semiconductor device and extending in a first direction, and a plurality of dummy patterns arranged in the first wiring layer and extending in a second direction different from the first direction, wherein each of the plurality of dummy patterns is arranged spaced apart from each of the plurality of wiring patterns and includes one or more dummy lands formed by separating a part of the dummy pattern opposed to the wiring pattern, from the rest part of the dummy pattern.
申请公布号 US2010084769(A1) 申请公布日期 2010.04.08
申请号 US20090632304 申请日期 2009.12.07
申请人 NEC ELECTRONICS CORPORATION 发明人 KOBAYASHI NAOHIRO
分类号 H01L23/52 主分类号 H01L23/52
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