COATING MACHINE

摘要

PURPOSE: A coating device is provided to safely and efficiently process a substrate by employing a controller determining whether the coating at plurality of coating parts and the return processing of the substrate are possible at a substrate return part. CONSTITUTION: A coating device comprises a substrate return part(2) for returning a substrate(S); and a plurality of coating parts(3A,3B) for applying a liquid material to the substrate while returning the substrate by the substrate return part. The substrate return part has a substrate carry-in region(25S) at the end of one direction in a substrate return direction and a substrate carry-out region(28S) at the end of the other direction in the substrate return direction.