发明名称 Transistor for semiconductor device and method of forming the same
摘要 Disclosed herein is a transistor for a semiconductor device and a method of forming the same. According to the present invention, a recess channel region is formed on a cell region to increase a channel length and a fin-type channel region is simultaneously formed on a peripheral circuit region to increase a channel area so as to simplify process steps, thereby improving the yield and productivity for manufacturing a semiconductor device.
申请公布号 US7691699(B2) 申请公布日期 2010.04.06
申请号 US20050321537 申请日期 2005.12.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHUNG SUNG WOONG;LEE SANG DON
分类号 H01L21/8238 主分类号 H01L21/8238
代理机构 代理人
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