发明名称 Solid-state imaging device with light-collecting device having sub-wavelength periodic structure, solid-state imaging apparatus and manufacturing method thereof
摘要 The present invention provides a solid-state imaging apparatus and the like which is able to support an optical system whose incident angle is wide. Each pixel is 2.25 μm square in size, and includes a distributed index lens (1), a color filter (for example, for green) (2), an Al interconnections (3), a signal transmitting unit (4), a planarized layer (5), a light-receiving device (Si photodiodes) (6), and an Si substrate (7). The two-stage concentric circle structure of the distributed index lens is formed by SiO2 (n=2) with the film thickness 1.2 μm (“grey color”), the film thickness 0.8 μm (“dots pattern”) and the film thickness of 0 μm (“without pattern: white color”), and the medium surrounding the distributed index lens (1)is air (n=1).
申请公布号 US7692129(B2) 申请公布日期 2010.04.06
申请号 US20060423776 申请日期 2006.06.13
申请人 PANASONIC CORPORATION 发明人 TOSHIKIYO KIMIAKI;YOGO TAKANORI;ISHII MOTONORI;MATSUNO TOSHINOBU;ONOZAWA KAZUTOSHI
分类号 H01L27/00;H01L27/14;H04N5/335;H04N5/369;H04N101/00 主分类号 H01L27/00
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