发明名称 Shape simulation method, program and apparatus
摘要 A simulation environment establishment unit constructs a three-dimensional virtual space for a simulation, where a plurality of lattice points is orthogonally arranged as well as ensures in a storage step a storage region storing information for each of the plurality of lattice points. A surface shape processing unit sequentially grows and changes a material surface shape in the three-dimensional virtual space in accordance with manufacturing process conditions, calculates a level value representing a distance from the material surface for each lattice point, and stores the level value into a storage region of a corresponding lattice point to represent the surface shape. A material inside information processing unit calculates material inside information within the material when the surface passes through a lattice point due to the growth and change in the material and stores the material inside information into a storage region of a corresponding lattice point.
申请公布号 US7693694(B2) 申请公布日期 2010.04.06
申请号 US20060335609 申请日期 2006.01.20
申请人 FUJITSU LIMITED 发明人 FURUYA ATSUSHI
分类号 G06F9/455;H01L21/00 主分类号 G06F9/455
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