QUANTIFICATION METHOD OF FUNCTIONAL GROUPS OF ORGANIC LAYER

摘要

PURPOSE: A quantitative method of a functional group in an organic thin film is provided to quantify density of functional groups in an organic thin film and use as a certified reference material(CRM). CONSTITUTION: A quantitative method of a functional group in an organic thin film comprises: a step of measuring absolute amount of analysis standard material having an functional group contained in a standard organic thin film through MEIS(Medium Energy Ion Scattering spectroscopy); a step of measuring using a spectrum analyzer to obtain intensity of a functional group peak in the standard organic thin film; a step of measuring intensity of unknown amount of functional group peak; a step of comparing absolute amount of analysis standard material with intensity of functional peak to obtain absolute amount per area; and a step of calculating absolute amount of unknown amount of the functional group per area.