| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas detecting element that operates sufficiently at a low temperature of 50-80°C, and has high sensitivity, high response speed, and simple sensor structure, and to provide a gas detecting sensor. Ž<P>SOLUTION: In this gas detecting element 1, a porous thin film 3 having a porous structure formed of particles with an average diameter of 10-100 nm is formed on a substrate 2, the porous thin film 3 supports palladium and platinum 4, and the particle total area of particles such as a conductor constituting the porous thin film 3 becomes larger, so that the reactivity of palladium and platinum 4 for detecting combustible gas can be improved. Therefore, the gas detecting element that can perform sensing by measuring temperature change near the element 1 due to contact catalytic combustion of the combustible gas even in a low temperature region, has high response speed and high sensitivity can be provided. The gas detecting sensor having a simple structure and the gas detecting element can be provided. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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