| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for efficiently positioning the optical axis of a laser distance measuring unit 5<SB>1</SB>, 5<SB>2</SB>provided in a charged particle beam drawing apparatus for measuring the position of a stage 2 so that the optical axis crosses a beam center of a charged particle beam. <P>SOLUTION: This method of adjusting an optical axis comprises: fixing at a stage 2 an adjusting jig 6 in which there are formed a marker part 64 indicating a predetermined position point 64a and target parts 66<SB>1</SB>, 66<SB>2</SB>which a laser beam enters when the optical axis of a laser beam of laser distance measuring units 5<SB>1</SB>, 5<SB>2</SB>is positioned on lines in X and Y directions passing through the point 64a; adjusting the position of the stage 2 so that the point 64a meets the beam center; and adjusting the position of the optical axis of the laser distance measuring units 5<SB>1</SB>, 5<SB>2</SB>so that laser beams of the laser distance measuring units 5<SB>1</SB>, 5<SB>2</SB>enter the target parts 66<SB>1</SB>, 66<SB>2</SB>. <P>COPYRIGHT: (C)2010,JPO&INPIT |
