发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND METHOD FOR PRODUCING GLASS SUBSTRATE TO BE PROCESSED
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which exhibits excellent hydrofluoric acid resistance even in a small film thickness, and to provide a method for producing a glass substrate to be processed using the photosensitive resin composition. <P>SOLUTION: The photosensitive resin composition includes an alkali-soluble resin (A) prepared by reacting an acid radical-containing acrylic resin with an alicyclic epoxy group-containing unsaturated compound, a monomer (B) of trifunctional or more, a photopolymerization initiator (C), and an aminosilane coupling agent (D) having a group represented by formula (1) or (2) at an end. In the formulae (1) and (2), R<SP>1</SP>and R<SP>2</SP>are each independently H or 1-5C alkyl. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010072518(A) 申请公布日期 2010.04.02
申请号 JP20080242234 申请日期 2008.09.22
申请人 TOKYO OHKA KOGYO CO LTD 发明人 UEMATSU TERUHIRO;TAKAGI TOSHIYA
分类号 G03F7/075;C08F290/06;G03F7/027;G03F7/038;G03F7/40 主分类号 G03F7/075
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