SOLID SILICA MEMBRANE, HYDROCARBON SEPARATING MEMBRANE USING THE SAME, AND METHOD FOR MANUFACTURING HYDROCARBON SEPARATING MEMBRANE

摘要

PROBLEM TO BE SOLVED: To provide a solid silica membrane which can be stably used under high temperature and high pressure conditions and can separate hydrocarbons, an olefin/paraffin mixture in particular, and to provide a hydrocarbon separating membrane using the solid silica membrane and a method for manufacturing the hydrocarbon separating membrane. Ž

SOLUTION: The solid silica membrane is porous and can selectively pass unsaturated hydrocarbons therethrough, has a monovalent hydrocarbon group at its surface and peak intensity of a silanol group (Si-OH) at 3000 cm-1obtained by infrared absorption spectrum measurement is 1/10 or less of peak intensity of siloxane bonding (Si-O-Si) at 1500 cm-1. The hydrocarbon separating membrane comprises the solid silica membrane formed on a surface of a porous ceramic support. In the method for manufacturing the hydrocarbon separating membrane, the solid silica membrane is produced by a CVD method using a gaseous mixture composed of oxygen and/or ozone and inert gas and an evaporated silica source so as to block micropores at a porous ceramic support surface. Ž

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