| 摘要 |
PURPOSE: The substrate clamping mechanism of the vacuum pressure mode grips substrate by using the vacuum pressure or the pneumatic air pressured without the separate clamp tool. The configuration of the apparatus is simplified. CONSTITUTION: A substrate clamping mechanism(1000) comprises the supporting part(100), and the clamp(200) and driving part(300). The supporting part supports substrate. It is arranged on the supporting part and clamp grips the edge of substrate site. The driving part is connected to clamp. By being driven with the driving part and using the vacuum pressure or pneumatic, clamp grips the edge of substrate site.
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