发明名称 METHOD FOR MEASURING A SPECTRUM OF A NARROWBAND LIGHT SOURCE, AND SPECTROMETER ARRANGEMENT
摘要 A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers ≧1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra—recorded by the at least one detector—of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.
申请公布号 US2010079765(A1) 申请公布日期 2010.04.01
申请号 US20090558874 申请日期 2009.09.14
申请人 CARL ZEISS LASER OPTICS GMBH 发明人 KRAUS JOHANNES;HERKOMMER ALOIS;WEIGL BERNHARD;MAIRE MICHEL LE;MUENZ HOLGER
分类号 G01J3/45 主分类号 G01J3/45
代理机构 代理人
主权项
地址