Method for manufacturing acceptors in semiconductor body, involves providing semiconductor body and bringing foreign matter into semiconductor body

摘要

The method involves providing a semiconductor body (10) and bringing a foreign matter (11) into the semiconductor body. The semiconductor body is illuminated with protons (12) to form a lattice vacancy in the semiconductor body. A temperature treatment of the semiconductor body is done for the formation of acceptor from the foreign matter and the lattice vacancy thus forming complexes.