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发明名称
Vorrichtung zur Inspektion eines mikroskopischen Bauteils mit einem Immersionsobjektiv
摘要
申请公布号
DE102004033208(B4)
申请公布日期
2010.04.01
申请号
DE200410033208
申请日期
2004.07.09
申请人
VISTEC SEMICONDUCTOR SYSTEMS GMBH;MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESTECHNIK GMBH
发明人
SCHEURING, GERD;HILLMANN, FRANK;BRUECK, HANS-JUERGEN
分类号
G01M11/00;G02B21/26
主分类号
G01M11/00
代理机构
代理人
主权项
地址
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