| 摘要 |
PURPOSE: A scanning Moire measurement method using a concentrated light is provided to easily scan a line beam according to an image feature obtained by a camera without requiring a complex configuration including a beam splitter or half mirror. CONSTITUTION: A scanning Moire measurement method using a concentrated light comprises the steps of: scanning a projection grating pattern through a cylinder lens(400) to a specimen(600), positioning the initial point of the specimen on the vertical line of a camera(500), setting a projection grating(300) in an initial position, continuously moving the specimen from the initial point to a final position while keeping the projection grating in position, moving the projection grating in the same direction as the specimen to have a phase difference from the initial position, moving the specimen and obtaining a second image with respect to the projection grating, and repeating the displacement of the projection grating and specimen and obtaining third and fourth images.
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