SEMICONDUCTOR DEVICE FABRICATION EQUIPMENT WITH SHOWERHEAD

摘要

PURPOSE: A device with a shower head for manufacturing a semiconductor device is provided to improve the process uniformity of a substrate by supplying the process gas with a preset ratio by removing the linearity of the inputted gas. CONSTITUTION: A reaction gas shower head module(410) includes an upper plate(541), a lower plate(549), and a plurality of reaction gas spray tubes(451,551). A purge gas shower head module(610) is arranged under the reaction gas shower head module. A cooling jacket(710) is arranged under the purge gas shower head module and includes a reaction gas spray tube guide(781) passing through a reaction gas spray tube(451). The reaction gas spray tube guide has the larger diameter than the reaction gas spry tube to pass the purge gas through a gap between the inner walls and the outer wall of the reaction gas spray tube.