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发明名称
Method for forming storage electrode of semiconductor device
摘要
申请公布号
KR100950470(B1)
申请公布日期
2010.03.31
申请号
KR20070061416
申请日期
2007.06.22
申请人
发明人
分类号
H01L21/8242;H01L27/108
主分类号
H01L21/8242
代理机构
代理人
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