发明名称 Storage capacitor, a memory device and a method of manufacturing the same
摘要 A storage capacitor includes a first capacitor portion and a second capacitor portion, the second capacitor portion being disposed above the first capacitor portion, thereby defining a first direction. The first and the second portions each include a hollow body made of a conductive material, respectively, thereby forming a first capacitor electrode. An upper diameter of each of the hollow bodies is larger than a lower diameter of the hollow body, the diameter being measured perpendicularly with respect to the first direction. The storage capacitor also includes a second capacitor electrode and a dielectric material disposed between the first and the second capacitor electrodes. The storage capacitor also includes an insulating material disposed outside the hollow bodies, and a layer of an insulating material. A lower side of the insulating layer is disposed at a height of an upper side of the first capacitor portion.
申请公布号 US7687343(B2) 申请公布日期 2010.03.30
申请号 US20060633090 申请日期 2006.12.04
申请人 QIMONDA AG 发明人 MOLL PETER;BAARS PETER;SCHLOESSER TILL;WEIS ROLF;MUEMMLER KLAUS
分类号 H01L21/8242 主分类号 H01L21/8242
代理机构 代理人
主权项
地址