发明名称 |
Manufacturing method of semiconductor device |
摘要 |
A method of manufacturing a low power dissipation semiconductor power device is provided which is easy to perform and suitable for mass production. When a first and second conductivity-type regions are formed on a semiconductor substrate which is selectively irradiated by impurity ions, an excellent super junction is formed by controlling the ion acceleration energy and the width of each irradiated region so that the first and second conductivity-type regions may have a uniform impurity distribution and a uniform width along the direction of irradiation. Another method of manufacturing a low power dissipation semiconductor power device having an excellent super junction is provided which selectively irradiates a collimated neutron beam onto a P+ silicon ingot and forms an N+ region that has a uniform impurity distribution and a uniform width along the direction of irradiation in the P+ silicon ingot.
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申请公布号 |
USRE41181(E1) |
申请公布日期 |
2010.03.30 |
申请号 |
US20040817623 |
申请日期 |
2004.04.05 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
TAKEDA TORU;TSUNODA TETSUJIRO |
分类号 |
H01L21/265;H01L21/425;H01L21/261;H01L21/266;H01L29/06;H01L29/78 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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