发明名称 Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method
摘要 A vibration isolation device which dampens vibration of an object. The device includes a vibration isolation unit that can be activated in a plurality of vibration isolation modes, an acquisition unit that acquires estimate information associated with vibration of a floor, in which the acquisition unit receives data associated with an influence degree of seismic vibration and an influence time zone of the seismic vibration from an external device, and a control unit that selects a vibration isolation mode from the plurality of vibration isolation modes, in accordance with the estimate information acquired by the acquisition unit, and activates the vibration isolation unit in the selected vibration isolation mode. The control unit switches between the vibration isolation modes of the vibration isolation unit in accordance with the influence degree and the influence time zone.
申请公布号 US7686144(B2) 申请公布日期 2010.03.30
申请号 US20080060587 申请日期 2008.04.01
申请人 CANON KABUSHIKI KAISHA 发明人 SHIBAYAMA TAKASHI;MAYAMA TAKEHIKO;UKAJI TAKAO
分类号 F16M13/00 主分类号 F16M13/00
代理机构 代理人
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