SCREEN OF ION BEAM APPARATUS

摘要

PURPOSE: A screen of an ion-beam apparatus is provided to prevent secondary collision of the ion beam and the substrate and to offer liquid crystal display having good screen quality by preventing sputtering phenomenon of the screen due to the ion-beam. CONSTITUTION: A screen of an ion-beam apparatus comprises a screen(40) and a gas absorption film(45). The ion-beam is irradiated on the substrate coated with an orientation film in a predetermined tilt angle. A gas absorption film is coated with gas adsorption material to absorb the ions which orientation is converted after colliding with the substrate. The gas absorption film is formed on the surface of the screen. The gas absorption film is formed only on the surface facing the substrate.