发明名称 METHOD TO SEPARATE SOLID-STATE PLATES WITH TWO-SIDED THIN-FILM COAT INTO CRYSTALS
摘要 FIELD: process engineering. ^ SUBSTANCE: invention relates to electronics engineering and can be used to produce crystals of thermal transducers and thermometers. Proposed method comprises forming marks by diamond cutter on plate surface and separation by bending the plate. Note here that marks are formed on both sides of the plate. Marks arranged on plate side extended in separation, are formed to depth of 1.1 to 1.3 of coat thickness, while those on contracted side are formed to depth of 2.5 to 3.0 of coat thickness. ^ EFFECT: higher reliability and yield of ready crystals. ^ 3 dwg
申请公布号 RU2385218(C1) 申请公布日期 2010.03.27
申请号 RU20080148359 申请日期 2008.12.08
申请人 GOSUDARSTVENNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "URAL'SKIJ GOSUDARSTVENNYJ TEKHNICHESKIJ UNIVERSITET-UPI IMENI PERVOGO PREZIDENTA ROSSII B.N. EL'TSINA" 发明人 ZHUKOV JURIJ NIKOLAEVICH
分类号 B26F3/00;H01L21/00 主分类号 B26F3/00
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