APPARATUS FOR TEST OF SUBSTRATE IN IMPRINT PROCESS

摘要

PURPOSE: A substrate test apparatus for an imprint process is provided to accurately test the contact uniformity in the imprint process by measuring the uniformity of resin thickness between a substrate and a mold. CONSTITUTION: A substrate test apparatus(100) for an imprint process comprises a light source(10), a suction plate(30), a mold glass, and an imaging unit(70). The light source projects light beam and includes a diffuser which evenly diffuses the light beam. The suction plate supports and holds a substrate. The mold glass is arranged between the substrate and the light source. The imaging unit acquires partial light reflected from a half mirror layer and an interference image.