ION IMPLANTATION METHOD, METHOD OF PRODUCING SOLID-STATE IMAGING DEVICE, SOLID-STATE IMAGING DEVICE, AND ELECTRONIC APPARATUS

摘要

PURPOSE: An ion injection method, a manufacturing method of a solid imaging apparatus, and a solid imaging apparatus and an electronic device are provided to adopt an ion implantation mask. The pixel size of the solid imaging apparatus can be reduced. CONSTITUTION: An ion implantation is multiple times enforced using a plurality of ion implantation masks. The ion implantation mask comprises a main mask portions(23), and a bridge section(24) and an opening(25). The master mask cattail is each other connected with bridge sections. A plurality of ion implantation masks is combined and a plurality of cyclic type ion implantation regions is formed.