| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor that stably prevents a zero point shift of a sensor signal produced when a large acceleration which has high frequency is added. Ž<P>SOLUTION: A detection frame 5 is supported by a substrate 1 and has a first part P1. The first part P1 is faced to a main surface MS via a void 31 of the first dimension D1, when the acceleration in the direction of outside of a plane of the main surface MS is zero, and is configured to displace into the direction of outside of the plane of the main surface MS corresponding to the acceleration in the direction of outside of the plane of the main surface MS. A silicon cap 20a is fixed to the substrate 1 and made of silicon, while sandwiching the first part P1 between itself and the main surface MS and facing the first part P1 via the void 32 of the second dimension D2, when the acceleration in the direction of outside of the plane of the main surface MS is zero. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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